Structural Study of SIC/AIN Bilayers and Trilayers on SI...

Structural Study of SIC/AIN Bilayers and Trilayers on SI and 6H-SIC

Prasad Beesabathina, D., Fekade, K., Wongchotigul, K., Spencer, M. G., Salamanca-Riba, L.
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Volume:
339
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-339-363
Date:
January, 1994
File:
PDF, 3.25 MB
english, 1994
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