Growth of Epitaxial 2H-silicon Carbide by Pulsed Laser...

MRS Proceedings 1994 / 1 Vol. 339

Growth of Epitaxial 2H-silicon Carbide by Pulsed Laser Deposition

Stan, Mark A., Patton, Martin O., Vithana, Hemasiri K. M., Johnson, David L., Warner, Joseph D., Piltch, Nancy D., Yang, Jinwei, Pirouz, Pirouz
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Volume:
339
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-339-423
Date:
January, 1994
File:
PDF, 2.14 MB
english, 1994
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