In-Situ Multiprocessing of Ultrathin Silicon Nitride...

MRS Proceedings 1994 / 1 Vol. 342

In-Situ Multiprocessing of Ultrathin Silicon Nitride Capacitors for Advanced Dram Cells

Thakur, Randhir P.S., Hawthorne, Rick, Mathews, Viju K., Fazan, Pierre C., Werkhoven, Chris J., Granneman, Ernst, Wilhelm, Rudy
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Volume:
342
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-342-195
Date:
January, 1994
File:
PDF, 987 KB
english, 1994
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