Borophosphosilicate Glass(BPSG) Fusion Using Rapid Thermal...

MRS Proceedings 1994 / 1 Vol. 342

Borophosphosilicate Glass(BPSG) Fusion Using Rapid Thermal Annealing and Steam Reflow: Physical Properties and Device Implications

Maxim, Mike, Moinpour, Mansour, Chu, John, Nguyen, Hien, Freiberger, Phil, Stenton, Nicky
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Volume:
342
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-342-289
Date:
January, 1994
File:
PDF, 3.19 MB
english, 1994
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