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In-Situ Doped Multi-Layer Epitaxial Structures with Abrupt Doping Transitions by Ultra High Vacuum Rapid Thermal Chemical Vapor Deposition (UHV-RTCVD)
ÅztÖjrk, Mehmet C., Muhsin, S., Ban, Ibrahim, Harris, Gari, Sanganeria, Mahesh K., Violette, Katherine E., Lee, ArchieVolume:
342
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-342-43
Date:
January, 1994
File:
PDF, 500 KB
english, 1994