Low Dielectric Constant, High Temperature Stable Copolymer...

MRS Proceedings 1994 / 1 Vol. 343

Low Dielectric Constant, High Temperature Stable Copolymer Thin Films by Room Temperature Chemical Vapor Deposition

Gaynor, Justin F., Desu, Seshu B.
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Volume:
343
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-343-541
Date:
January, 1994
File:
PDF, 378 KB
english, 1994
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