Fabrication of Polycrystalline Si1− xGe x Films on Oxide...

MRS Proceedings 1994 / 1 Vol. 343

Fabrication of Polycrystalline Si1− xGe x Films on Oxide for Thin-Film Transistors

Tsai, Julie A., Tang, Andrew J., Reif, Rafael
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Volume:
343
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-343-679
Date:
January, 1994
File:
PDF, 3.61 MB
english, 1994
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