Evolution of the Properties of Reactively Sputtered Zirconium Nitrides on Silicon Substrates
Brande, Pierre Vanden, Lucas, Stephane, Winand, Rene, Renard, Lucien, Weymeersch, AlainVolume:
343
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-343-759
Date:
January, 1994
File:
PDF, 369 KB
english, 1994