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Growth of Diamond Films Using C3F8 AND H2 in A New System
Huangfu, Ping, Jin, Zengsun, Lu, Xianyi, Zou, Guangtian, Xiao, Huaxian, Chen, Tianyi, Liu, MingkaiVolume:
349
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-349-415
Date:
January, 1994
File:
PDF, 2.05 MB
english, 1994