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X-Ray Studies of Strain in Laser-Crystallized SOI Films
Rivier, Michel, Reidinger, F., Goetz, G., Mckitterick, J., Cserhati, A.Volume:
35
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-35-681
Date:
January, 1984
File:
PDF, 197 KB
english, 1984