Ion Beam Synthesis by Tungsten-Implantation Into 6H-SIC

MRS Proceedings 1994 / 1 Vol. 354

Ion Beam Synthesis by Tungsten-Implantation Into 6H-SIC

Weishart, Hannes, Schöneich, J., Steffen, H. J., Matz, W., Skorupa, W.
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Volume:
354
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-354-177
Date:
January, 1994
File:
PDF, 362 KB
english, 1994
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