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Residual Deformations Induced By The Thermal Shock During Pulsed Ion Implantation
Feugeas, Jorge N., BrÜhl, S. P., Sanchez, G., Kaufmann, G. H.Volume:
354
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-354-33
Date:
January, 1994
File:
PDF, 798 KB
english, 1994