Measuring Vacancy Diffusivity and Vacancy Assisted...

MRS Proceedings 1994 / 1 Vol. 355

Measuring Vacancy Diffusivity and Vacancy Assisted Clustering by Nitridation Enhanced Diffusion of Sb IN Si(100) Doping Superlattices

Mogi, Toshiharu K., Gossmanri, H. -J., Rafferty, C. S., Luftman, H. S., Unterwald, F. C., Boone, T., Thompson, Michael O., Poate, J. M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
355
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-355-157
Date:
January, 1994
File:
PDF, 382 KB
english, 1994
Conversion to is in progress
Conversion to is failed