Microstructures of Tungsten Suicide Films Deposited by CVD...

MRS Proceedings 1994 / 1 Vol. 355

Microstructures of Tungsten Suicide Films Deposited by CVD and by Sputtering

Kim, Young-Wug, Lee, Nae-In, Park, Moon-Han
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Volume:
355
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-355-491
Date:
January, 1994
File:
PDF, 2.38 MB
english, 1994
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