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The Effect of Intrinsic Passivation Stress on Stress in Encapsulated Interconnect Lines
Mack, Anne Sauter, Flinn, PaulVolume:
356
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-356-465
Date:
January, 1994
File:
PDF, 615 KB
english, 1994