Relationship Between Stress and Surface Roughness in...

Relationship Between Stress and Surface Roughness in Krypton Implanted MgO

Gea, Laurence, Loubet, Jean-Luc, Brenier, Roger, Thevenard, Paul
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Volume:
356
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-356-57
Date:
January, 1994
File:
PDF, 1.10 MB
english, 1994
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