Diffusion of Dopants in (111) Silicon During High...

MRS Proceedings 1984 / 1 Vol. 36

Diffusion of Dopants in (111) Silicon During High Temperature Heat Treatment in Nitrogen

Kook, T., Jaccodine, R. J.
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Volume:
36
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-36-83
Date:
January, 1984
File:
PDF, 1.53 MB
english, 1984
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