Effects of Annealings on Pt/TiN/Ti Interfacial Reactions
Varniere, F., Eakim, B., Agius, B., Bisaro, R., Olivier, J., Chevrier, G., Achard, H., Mace, H., Peccoud, L.Volume:
361
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-361-235
Date:
January, 1994
File:
PDF, 379 KB
english, 1994