Improved Electrical Properties of SrTiO3, Thin Films by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition
Yabuta, Hisato, Takemura, Koichi, Yamaguchi, Hiromu, Sone, Shuji, Sakuma, Toshiyuki, Yoshida, MasajiVolume:
361
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-361-325
Date:
January, 1994
File:
PDF, 404 KB
english, 1994