Fabrication of Diamond and Diamond-Like Carbon by Low...

MRS Proceedings 1994 / 1 Vol. 363

Fabrication of Diamond and Diamond-Like Carbon by Low Pressure Inductively Coupled Plasma CVD

Okada, Katsuyuki, Komatsu, Shojiro, Ishigaki, Takamasa, Matsumoto, Seiichiro
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Volume:
363
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-363-157
Date:
January, 1994
File:
PDF, 1.33 MB
english, 1994
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