Influence of Precursor Chemistry on Synthesis of Silicon-Carbon-Germanium Alloys
Todd, Michael, Kouvetakis, John, Matsunaga, Phillip, Chandrasekhar, D., Smith, DavidVolume:
377
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-377-529
Date:
January, 1995
File:
PDF, 2.54 MB
english, 1995