Fabrication of Undoped and N+ Microcrystalline si Films Using SiH2Ci2
Byun, Jae Seong, Jeon, Hong Bin, Jun, Jung Mok, Yoo, Jae Ho, Lee, Kyung Ha, Park, Min, Jang, JinVolume:
377
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-377-75
Date:
January, 1995
File:
PDF, 304 KB
english, 1995