Effects of Lateral Limited Area and Substrate Compliance on Strain Distribution and Critical Thickness of Sige Film on Si Mesa Substrates
Rong, Zhang, Hongbin, Huang, Yi, Shi, Kai, Yang, Shulin, Gu, Ronghua, Wang, Shunming, Zhu, Youdou, ZhengVolume:
379
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-379-61
Date:
January, 1995
File:
PDF, 941 KB
english, 1995