The Application of Reactive ion Etching to Oxide Films on...

MRS Proceedings 1984 / 1 Vol. 38

The Application of Reactive ion Etching to Oxide Films on 150mm Substrates

Dunfield, Stephen, Deacon, Tom, Pandhumsoporn, Tam
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-38-261
Date:
January, 1984
File:
PDF, 829 KB
english, 1984
Conversion to is in progress
Conversion to is failed