Low Dielectric Constant Polymers For On-Chip Interlevel...

MRS Proceedings 1995 / 1 Vol. 381

Low Dielectric Constant Polymers For On-Chip Interlevel Dielectrics With Copper Metallization

Gutmann, Ronald J., Chow, T. Paul, Duquette, David J., Lu, Toh-Ming, Mcdonald, John F., Murarka, Shyam P.
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Volume:
381
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-381-177
Date:
January, 1995
File:
PDF, 3.65 MB
english, 1995
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