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Absolute Calibration of Sims Depth Profiles of a-SiNx:H/a-Si:H and a-SiOx:H/a-Si:H Multilayers
Li, Jianwei, Chabala, Jan M., Levi-Setti, RiccardoVolume:
382
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-382-203
Date:
January, 1995
File:
PDF, 828 KB
english, 1995