Deposition of Diamond-Like Carbon Films by PECVD
Park, Kyu Chang, Chun, Soo Chul, Song, Kyo Jun, Park, Min, Oh, Myung Hwan, Choi, Seong Soo, Park, Jung Hae, Yang, In Sang, Jang, JinVolume:
383
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-383-373
Date:
January, 1995
File:
PDF, 274 KB
english, 1995