![](/img/cover-not-exists.png)
A Comparative Study of Residual Stresses and Microstructure in a-tC Films
Martínez-Miranda, L. J., Sullivan, J. P., Friedmann, T. A., Siegal, M. P., Mercer, T. W., Dinardo, N. J.Volume:
383
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-383-459
Date:
January, 1995
File:
PDF, 360 KB
english, 1995