Deposition of Ca+, Na+, Al+, K+ on Single-Crystal Si From...

MRS Proceedings 1995 / 1 Vol. 386

Deposition of Ca+, Na+, Al+, K+ on Single-Crystal Si From DIH20: NH40H: H202 and DIH20: HCL: H202 as Analyzed by ToF-SIMS and SPV

Debusk, Damon, Lowell, John, Reich, Fraser

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Volume:

386

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-386-151

Date:

January, 1995

File:

PDF, 1.16 MB

english, 1995

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