Transient And Spatial Radiative Properties Of Patterned Wafers During Rapid Thermal Processing
Wong, Peter Y., Miaoulis, Ioannis N., Madras, Cynthia G.Volume:
387
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-387-15
Date:
January, 1995
File:
PDF, 518 KB
english, 1995