Substrate Heating Measurements in Pulsed Ion Beam Film Deposition
Olson, J. C., Thompson, M. O., Davis, H. A., Rej, D. J., Waganaar, W. J., Tallant, D. R.Volume:
388
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-388-171
Date:
January, 1995
File:
PDF, 316 KB
english, 1995