Void Formation in Thin Semiconducting Film Under Ion...

MRS Proceedings 1995 / 1 Vol. 389

Void Formation in Thin Semiconducting Film Under Ion Implantation

Zhikharev, V. A., Batyrshin, F. R.
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Volume:
389
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-389-155
Date:
January, 1995
File:
PDF, 224 KB
english, 1995
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