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Monte Carlo Simulation of Dislocation-Nucleated Etching of Silicon {111} Surfaces
Woodraska, Donald L., Lacosse, Jason, Jaszczak, John A.Volume:
389
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-389-209
Date:
January, 1995
File:
PDF, 2.15 MB
english, 1995