The Effects of Collimator Life Time on the Ti and Tin Film...

MRS Proceedings 1995 / 1 Vol. 389

The Effects of Collimator Life Time on the Ti and Tin Film Growth Rates and Conformalities in Sputter Deposition Processes: Experiments and Simulations

Liao, Hung, Stippel, Hannes, Reddy, Krishna, Geha, Sam, Brown, Kevin, Lindorfer, Philipp, Saha, Samar, Lin, Zhou, Cale, Timothy
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Volume:
389
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-389-263
Date:
January, 1995
File:
PDF, 1.68 MB
english, 1995
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