Modeling, Simulation and Control of Single Wafer Process in...

MRS Proceedings 1995 / 1 Vol. 389

Modeling, Simulation and Control of Single Wafer Process in Cluster Tool Base on Ft-Ir In-Line Sensor

Liu, Shaohua, Solomon, Peter, Carpio, R., Fowler, B., Simmons, D., Wang, J., Wise, R., Imper, G., Riley, N.B., Moslehi, M., Ravindra, N.M.
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Volume:
389
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-389-269
Date:
January, 1995
File:
PDF, 381 KB
english, 1995
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