Quantitative Three-Dimensional Characterization of the Morphology of Stressed and Electromigrated Aluminum Lines
Ramseyer, George O., Beasock, Joseph V., Helbig, Herbert F., Walsh, Lois H.Volume:
391
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-391-373
Date:
January, 1995
File:
PDF, 1.83 MB
english, 1995