![](/img/cover-not-exists.png)
Ex Situ and in Situ Methods for Oxide and Carbon Removal from AlN and GaN Surfaces
King, Sean W., Smith, Laura L., Barnak, John P., Ku, Ja-Hum, Christman, Jim A., Benjamin, Mark C., Bremser, Michael D., Nemanich, Robert J., Davis, Robert F.Volume:
395
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-395-739
Date:
January, 1995
File:
PDF, 525 KB
english, 1995