Ex Situ and in Situ Methods for Oxide and Carbon Removal...

Ex Situ and in Situ Methods for Oxide and Carbon Removal from AlN and GaN Surfaces

King, Sean W., Smith, Laura L., Barnak, John P., Ku, Ja-Hum, Christman, Jim A., Benjamin, Mark C., Bremser, Michael D., Nemanich, Robert J., Davis, Robert F.
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Volume:
395
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-395-739
Date:
January, 1995
File:
PDF, 525 KB
english, 1995
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