Carbon Nitride (Cnx) Films Formed by Ion Implantation into Thin Carbon Films
Husein, Imad F., Zhou, Yuanzhong, Chan, Chung, Kleiman, Jacob I., Gudimenko, Yu, Leung, Ka-NgoVolume:
396
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-396-255
Date:
January, 1995
File:
PDF, 330 KB
english, 1995