Short-Time Hydrogen Passivation of Poly-Si CMOS Thin film...

MRS Proceedings 1995 / 1 Vol. 396

Short-Time Hydrogen Passivation of Poly-Si CMOS Thin film Transistors by High Dose Rate Plasma Ion Implantation

Qin, Shu, Bernstein, James D., Zhou, Yuanzhong, Liu, Wei, Chan, Chung, King, Tsu-Jae
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Volume:
396
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-396-515
Date:
January, 1995
File:
PDF, 314 KB
english, 1995
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