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Controls of Crystallinity and Surface Roughness of Cu Film in Partially Ionized Beam Deposition
Koh, Seok-Keun, Kim, Ki-Hwan, Choi, Won-Kook, Jang, Hong-Gui, Yoon, Young-Soo, Han, Sung, Jung, Hyung-JinVolume:
396
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-396-581
Date:
January, 1995
File:
PDF, 388 KB
english, 1995