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Fast Scanned Energy Beam Induced Explosive Crystallization of Ion Implantation Amorphized Poly and Single Crystal Silicon Substrates
Lerme, M., Ternisien D'ouville, T., Vu, Duy-Phach, Perio, A., Rozgonyi, G.A., Nguyen, V. T.Volume:
4
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-4-547
Date:
January, 1981
File:
PDF, 1.31 MB
english, 1981