Preparation of WSi2 by RTA Annealing of CVD-W thin Films
Gesheva, K. A., Stoyanov, G. I., Gogova, D. S., Beshkov, G. D.Volume:
402
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-402-637
Date:
January, 1995
File:
PDF, 874 KB
english, 1995