Ti-Salicide Improvement by Preamorphization for ULSI Applications
Chenl, Chun-Cho, Wang, Q. F., Jonckx, Franky, Jenq, Jyh-Shyang, Maex, KarenVolume:
402
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-402-89
Date:
January, 1995
File:
PDF, 1.08 MB
english, 1995