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Effects of Deposition Parameters on Crystallization of Pecvd Amorphous Silicon Films
Wang, Yaozu, Kingi, Reece, Awadelkarim, Osama O., Fonash, Stephen J.Volume:
403
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-403-373
Date:
January, 1995
File:
PDF, 2.04 MB
english, 1995