![](/img/cover-not-exists.png)
Microstructure and Activity of Thin Films for a Microelectronic Gas Sensor
Patel, Sanjay V., Dibattistam, Michael, Gland, John L., Schwank, Johannes W.Volume:
403
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-403-559
Date:
January, 1995
File:
PDF, 4.37 MB
english, 1995