Characteristics of a Reactively Sputtered Indium Tin Oxide...

MRS Proceedings 1995 / 1 Vol. 403

Characteristics of a Reactively Sputtered Indium Tin Oxide Thin Film Strain Gage for Use at Elevated Temperatures

Gregory, Otto J., Dyer, Stephen E., Amons, Paul S., SLOT, Arnout Bruins
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Volume:
403
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-403-597
Date:
January, 1995
File:
PDF, 436 KB
english, 1995
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