Real-Time Monitoring Of GaAs(100) Etching By Surface...

MRS Proceedings 1995 / 1 Vol. 406

Real-Time Monitoring Of GaAs(100) Etching By Surface Photoabsorption

Eng, Joseph, Fang, Hongbin, Su, Chaochin, Vemuri, Sujata, Herman, Irving P., Bent, Brian E.
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Volume:
406
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-406-151
Date:
January, 1995
File:
PDF, 399 KB
english, 1995
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