The Use of Ion Channeling Axial Scans in the Study of...

MRS Proceedings 1984 / 1 Vol. 41

The Use of Ion Channeling Axial Scans in the Study of Ion-Implanted Al2O3

Farlow, G. C., White, C. W., Appleton, B. R., Sklad, P. S., McHargue, C. J.
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Volume:
41
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-41-295
Date:
January, 1984
File:
PDF, 323 KB
english, 1984
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