Synthesis and Oxidation Kinetics of Sol-Gel and Sputtered...

MRS Proceedings 1995 / 1 Vol. 410

Synthesis and Oxidation Kinetics of Sol-Gel and Sputtered Tantalum Nitride Thin Films

Kraus, Gerald T., Oldweiler, Cory S., Giannelis, Emmanuel P.
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Volume:
410
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-410-295
Date:
January, 1995
File:
PDF, 355 KB
english, 1995
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