Real Time Ellipsometric Study of Boron Nitride Thin Film Growth
Bertran, E., Canillas, A., Campmany, J., Kasmi, M. El, Pascual, E., Costa, J., Andújar, J. L.Volume:
410
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-410-307
Date:
January, 1995
File:
PDF, 294 KB
english, 1995